Integrated Nanosystems Research Facility

SPTS Users,

The SPTS will be taken offline on 11/1/17 for the much needed PM.  It is looking like the best estimate we have for the pump coming back will be approximately 12/11/17.  A PM of the SPTS system itself, by an SPTS engineer, will need to be coordinated when the repaired pump returns and is installed back on the tool.  As of now we’re hoping this will all be completed by end of December.

More details and updates will follow as and when available.