Integrated Nanosystems Research Facility

1- Users that are using various types of tools are responsible for performing the cleaning process.

When it comes to the RIE, ICP, DRIE the rule of thumb is two to one.  So if etching for one hour we expect you to do a thirty minute clean.

This has not been occurring and this needs to change.  While Jake has been performing maintenance on the various chambers he has noticed they have been very dirty/ contaminated.  Part of the cleaning process is added to your usage time, and by performing these cleaning processes the tool turn around time for maintenance will be faster.


2- Lab-wide, users are also responsible for cleaning up after themselves.  Please be sure to clean up any mess that is made and be sure to discard of any trash in the appropriate waste containers. This applies not only on tables and benches but also on all tools including evaporators, characterization tools and etc. Please keep the areas clean.
3- Please also remember that you must have explicit permission from staff to make any modifications to tool recipes and parameters.  Generally the only thing that is allowed to be modified is the time of the etch, deposition, or process step.  Should you want to experiment with process parameters and modify standard recipes beyond the time, you must first go through staff approval.  Doing so without approval risks the health of the equipment for all users and is a violation.
4- Be on the lookout for tools that are down, in-repair, or are in maintenance and do NOT attempt to operate the tools in any status but Online.  Tags are usually posted physically on the tool, and the tool status is updated on the Equipment status of the Forged system.
5-Be sure to start and end your equipment sessions on the Forged system and notify staff immediately if any issue doing so.
6-Be sure to reserve your tool time on the Forged system tool calendar.  Staff does this with planned maintenance or repair work as well.  Viewing the calendar regularly will update you with such plans, and ensures that the tool will be available when you have reserved it.
7- Other things staff has been noticing in recent weeks include:
– the lack of the use of complete and accurate red hazardous in use and  blue process in use labels.  Many new labels have been recently created and can be found throughout the lab
-cabinets are being left open, or not properly closed and latched
-hot plates are being left on, unattended, and/or being used in forbidden locations (hot plates are not to be used on poly benches)
-buddy system and/or PPE protocols are not being followed properly
-chemicals are being left out beyond the time they should be left
We have posted ample signage throughout the lab to help remind users of the policies found on the INRF website, in the orientation and training process, in equipment and lab SOP documentation, and in all of the policies and procedures that every user has signed  in the User Policy Compliance agreement prior to entering the lab.
These policies are in place as safety to not only protect you, but those around you, staff, facilities, and everyone that works in or near these shared facilities. Additionally, the policies are in place to maximize the up-time and minimize the downtime of the tools and equipment in the facility as well as maximize their reliability and repeatability.
Staff will be paying closer attention by checking equipment data logs and log books. Any and all lab violations will be captured on the Forged system and will be tied to the Users’ profile page.  Violations and their penalties will be enforced.

Your compliance is appreciated.

Thank You,