We will be working on the Plasma therm RIE chamber to repair turbo pump
for low pressure process. Also cleaning the chamber. System will be back
online July 12th.
The K & S 780 dicing saw is down due to a cooling water leak in the sample
chuck which needs to be disassembled and repaired. System should be back
online July 15th.
Integrated Nanosystems Research Facility
