Integrated Nanosystems Research Facility

Here is a quick rundown:
  • SEM is experiencing high voltage issues. It will need further troulbeshooting to confirm.
  • Gasonics is still operational but the monitor screen needs replaced due to age.
  • Nanospec stand alone monitor stopped functioning. We are looking into upgrading the system so it will function from a Windows base program.
  • We are in the process of disassembling the Laurell photoresist bench to clean and repair vacuum issues.
  • We are in process of replacing diaphragm for the Pneumatic table that the MA6 Mask Aligner sits on.
  • We have received the repaired back up pump for the Trion ICP/TRI and plan to install Friday. Hopefully the system will be back online first part of next week.