Integrated Nanosystems Research Facility

STS plasma therm RIE & PECVD & low temperature BMR oxide and Nitrite systems are all off line due to our CDO (polution control device) that is required to be in operation while operating these tools experienced a high temperature alarm on the exhaust. While looking into this problem we noticed the reactive gases are eroding internal components. These components must be replaced. There is a good chance the systems will be back online this weekend.

Ion Milling system experienced a chamber vacuum leak and also the neutraliser wire needs to be replaced. At the present time we are using a leak detector to locate and verify the leak.
System should be back online by Monday.

ALD has been disassembled and the chamber and vacuum components to be sent out to be bead blasted. System should be back by Tuesday and we will be reassembled on Wednesday.

Gasonics experienced a faulty replacement part. We received the new part and has been installed but needs to be electronically set up. We hope to have the system up by this weekend.

Hitachi SEM baked out system for last three days. We are replacing the apature and realigning the beam. If all goes well the system should be back up by Thursday evening or Friday.

A Nano imprinter user was using the system Wednesday and noticed oil in the vacuum foreline. The system is tagged out temporily while I clean the foreline. It should be back online by Friday.

Saftey and Observation note.
USERS NEED TO BE MORE CONSCIENTIOUS ABOUT CLOSING WASTE CONTAINERS AFTER COMPLETION OF USING THE CONTAINERS. VERIFY THAT THE STORAGE CONTAINERS ARE FOR REACTIVE MATERIALS, SUCH AS SOLVENT AND ACIDS, AND THEY ARE THE PROPER CONTAINERS AND PROPERLY IDENTIFIED.

We observed while inspecting the lab in the evenings that users are leaving the microscope light on at high intensity. This creates more work for staff replacing lamps. If users do not know how to operate the microscopes properly please contact staff. We also noticed the stage locks being over tightened. Users are forcing the stage up and down which damages the microscope.
Your help in this area would be appreciated.

Thanks,
INRF Staff

For those of you that missed the first All Hands Meeting, please meet today in the Calit rm 3355 at 1:30pm. This is mandatory. If you cannot make it please email Ryan sryan@uci.edu.

*For those of you that cannot attend tomorrow’s meeting, we have scheduled a re-cap meeting next Wednesday, 2/22/11 at 1:30PM in the BiON meeting room (where Jake’s regular Wed meetings are held). In addition, we anticipate that the meeting will end at 3:00PM. This is a mandatory meeting for all users, so if you cannot make it to either meeting please let us know so we can make other arrangements. Safety Acknowledgment documentation that will be passed out at the meeting must be submitted before Monday, 2/27/11 in order for your account to remain active*

Dear INRF and BiON Cleanroom Users,

Lab safety is of critical importance to all cleanroom users. Therefore, with the assistance of EH&S we have updated our safety policies and procedures and will be presenting our new Lab Safety Handbook at the upcoming “All Hands User Meeting.” This meeting is mandatory and those absent will no longer be able to access the cleanroom. If you cannot attend, please let us know and we will schedule a separate time for you to come in.

The meeting is scheduled as follows:

Date: Thursday, 2/16/12
Time: 1:00PM – 3:00PM
Place: Calit2 Auditorium

Thank You!

Dear INRF and BiON Cleanroom Users,

Lab safety is of critical importance to all cleanroom users. Therefore, with the assistance of EH&S we have updated our safety policies and procedures and will be presenting our new Lab Safety Handbook at the upcoming “All Hands User Meeting.” This meeting is mandatory and those absent will no longer be able to access the cleanroom. If you cannot attend, please let us know and we will schedule a separate time for you to come in.

The meeting is scheduled as follows:

Date: Thursday, 2/16/12
Time: 1:00PM – 5:00PM
Place: Calit2 Auditorium

Thank You!

INRF Staff

As a reminder, eye protection is required while working inside the INRF and BION cleanrooms, please have safety glasses and or goggles on at all times. Also, appropriate safety gear is required while working with chemicals in the wet processing rooms. Safety is our number one priority, please let us know if you have any suggestions, questions or concerns.

EH&S is offering our annual laboratory hands on safety training class on Sept. 19, 20, 21 from 12-4:30.

Lunch is provided from at noon at the EH&S Office followed by a 4 hour training rotation through fire extinguisher training, spill clean-up, biosafety cabinet training, and risk assessment.

Free flame retardant lab coats and safety glasses will be provided at the end of the session. If interested, please contact Rebecca Lally:  rrlally@uci.edu.

Photoresist room (rm 2332) wet bench drain is not working properly due to someone inadvertently poured acetone or some type of solvent down the drain that fused and melted the ABS drainpipe. Facilities has to order replacement parts. The bench can only be used as a dry bench. Check with staff for further information.

On Thursday, May 19 we had a user try to cure some material on a substrate in
the high temperature inert oven. The material had a low VOC level which
filled the lab with discomfortable odors. We decided to close the lab for a short period to air out the facilities.

Be safe my friends!

Santa Rosa engineer suffered severe burns on his face and upper torso in a chemical explosion at Agilent Technologies’ Santa Rosa campus