Integrated Nanosystems Research Facility

Training

INRF and BiON are going to be offering three different workshops. The first will be lithography, the second will be Metal Deposition and the third will be Reactive Ion Etching. The purpose of these workshops is to give you more familiarity with the tools and their capabilities to give you the best end result that the tool is able to perform to. These workshops will consist of some lectures but mostly hands on.

You need to register and need to be a INRF or BiON user in order to attend the following workshops. Click on a category to expand and view the workshops. You may also view our Events Calendar for upcoming workshops.

Filmetrics F40 Nanospec

Familiarize users with SOP and discuss thin film measurement capabilities.

Instructor: Richard Chang
Length: 1hr
Schedule: Fall 2015 ( Workshops held on Tuesdays )

Register

Dektak XT Profilometer

Familiarize users with SOP and discuss surface Profilometry techniques.

Instructor: Dexter Humphrey
Length: 1hr
Schedule: Fall 2015 ( Workshops held on Tuesdays )

Register

Plasma-Therm PECVD Model 790

Familiar user with SOP and discuss adhesion and stress for SIO2 and Si3N4 deposition.

Instructor: Richard Chang
Length: 1hr
Schedule: Fall 2015 ( Workshops held on Tuesdays )

Register

BMR Low Temp PECVD

Familiarize users with SOP and discuss Low Stress thick film deposition for SiO2 and Si3N films.

Instructor: Mo Kebaili ( Workshops held on Wednesdayss )
Schedule: Fall 2015

Register

E-Beam 1 Evaporation

Familiarize users with SOP and Metallization techniques.

Instructor: Richard Chang
Length: 1hr
Schedule: Fall 2015 ( Workshops held on Tuesdays )

Register

CHA Mark 50 Evaporation

Familiarize users with SOP and Metallization techniques and substrate heating.

Instructor: Dexter Humphrey ( Workshops held on Tuesdays )
Length: 1hr
Schedule: Fall 2015

Register

Plasma Therm RIE Etch for Metal

Familiar user with SOP and discuss adhesion and stress for SiO2 and Si3N4 deposition.

Instructor: Richard Chang
Length: 1hr
Schedule: Fall 2015 ( Workshops held on Tuesdays )

Register

STS System DRIE

Familiar user with SOP and discuss deep trench BOSCH etching techniques on silicon.

Instructor: Mo Kebaili
Length: 1hr
Schedule: Fall 2015 ( Workshops held on Wednesdays )

Register

SPTS APS PM

Familiar user with SOP and discuss deep trench etching on glass.

Instructor: Mo Kebaili
Length: 1hr
Schedule: Fall 2015 ( Workshops held on Wednesdays )

Register

Trion ICP/RIE

Familiar user with SOP and discuss deep trench etching on glass.

Instructor: Mo Kebaili
Length: 1hr
Schedule: Fall 2015 ( Workshops held on Wednesdays )

Register

Karl Suss MA56 Mask Aligner

Overview of the MA56 and it’s various functions. Also covers flood exposure and photo resist application onto various substrates and the proper use of developing.

Instructor: Richard Chang
Length: 1hr
Schedule: Fall 2015 ( Workshops held on Tuesdays )

Register

Karl Suss MA6 Mask Aligner

Familiarize users with SOP and discuss photolithography techniques, backside alignment and image reversal process.

Instructor: Dexter Humphrey
Length: 1hr
Schedule: Fall 2015 ( Workshops held on Tuesdays )

Register