Integrated Nanosystems Research Facility

INRF & BiON Safety Assessment

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Users are responsible for installing or changing out gas cylinders.
Bringing drinks and food into the cleanroom is prohibited with the exception of water bottles.
With the exception of most personal electronics devices, any electrical equipment brought into the lab must have prior approval by an INRF/BiON staff member. Personal electronic devices that do not require prior approval include:
Safety glasses should be worn at all times in the lab, except perhaps when using a microscope or other
equipment with eyepieces.
Nitrile cleanroom gloves are provided and may be used in place of latex, by allergy sensitive individuals.
When working with corrosives and oxidizers, recommended protective gear includes:
Users should not aspirate chemicals without first consulting with INRF staff and EH&S.
The procedure for disposing of solid solvent/resist/flammable waste is:
It is the responsibility of lab staff to safely dispose of chemical waste.
Various tools can be reserved at the tool or by website. Only one slot can be reserved at a time.
When a chemical spill occurs in the cleanroom, you should respond by:
Mild solvents are the only chemicals that may be used outside of the wet benches. These include:
Users must access the facility or tools they are approved to use on a regular basis or accessibility will be denied. If you do not access the tools within 180 days access will be denied. If you do not access the facility within 90 days accessibility will be denied.
With proper use of wet bench and disposal procedures, the laboratory should be free of odors. In general, if you smell something,you should:
The appropriate response during a health threatening emergency such as a fire or toxic spill is to:
Super users are allowed to work in the lab alone when using hazardous material.
Ultra violet exposure is a potential risk when using plasma etch, plasma deposition, and sputter tools.
If a major earthquake occurs while working in the cleanroom, the appropriate response is to: