Integrated Nanosystems Research Facility

Dear INRF/ BiON Users:

Currently all the Su8 and lithography are available in the BiON Cleanroom.

Tentatively we are planning to move all the wet etch processes from INRF to BiON.
– The HF process will be set up in 1432.
– The organic cleaning process which is RCA1, RCA2 and Pirana will be in 1421.
– The metal etch will be done in 1422.

In the INRF Cleanroom, we are preparing to make available all the electroplating, lithography and developing processes.

We are hoping to have this accomplished by Monday, June 10th.

Please continue to check the blog for any changes.

INRF Staff