Integrated Nanosystems Research Facility

4 Inch Mini-Brute Tube

4 Inch Min-Brute Tubeicon-view-photos View Photo Gallery

Furnace used for bonding substrate

Top Tube

  • Substrate size up to 4”
  • Operates at temperatures 200°C to 1100°C

Bottom Tube

  • Substrate size up to 6”
  • Operates at temperatures 200°C to 1100°C
  • Auto loader