Integrated Nanosystems Research Facility

Gaertners Ellipsometer (staff tool)

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This ellipsometer is used for measuring thickness and refractive index of transparent films, especially on a silicon substrate. A disadvantage of this technique is the calculated film thickness leads to multiple solutions, so before measurement you need to know the thickness range (within 2800 Å for SiO2). Alternatives are to use two wavelengths of light or two incident angles to find a unique solution. Complex film structures may also be analyzed.