Karl Suss MA56 Mask Aligner

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• Fitted for (4″) four inch wafers using a 350W Exposure unit
• X, Y, Omega Stage & Scope Manipulator
• Cassette System with Prealigned Station
• Cassette to Cassette Wafer Loader
• Utilities Required: Vacuum, Compressed Air, Nitrogen, Power (1.1kW)
• Hg, Exposure Optics & Vacuum Contact Tooling intact
• Dimensions; 46 W x 42 D x 58 H approximately 1200 Pounds
• 120VAC