Integrated Nanosystems Research Facility
Resonetics Micromachining Technology Rapid X 250
Physical Properties
- Wavelength: ArF193 nm and KrF 248 nm
- Maximum pulse energy: 120 mJ
- Repetition rate: 100 Hz
- Pulse duration: 20 ns
- Resolution, down to 5 µm or less
Micromaching Materials
silicon, plastics, ceramics, glass, sapphire, other inorganic materials and metals
Industrial Applications
A tool for quick investigation on the prototype work with low cost in the following applications:
Microholes in the biomedical catheters, microfluidic channels, microlens array, plastic stent, microvias for circuit packaging, microholes for ink jet nozzles, fiber grating, and so on.
