Integrated Nanosystems Research Facility

Resonetics Micromachining Technology Rapid X 250

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Physical Properties
  • Wavelength: ArF193 nm and KrF 248 nm
  • Maximum pulse energy: 120 mJ
  • Repetition rate: 100 Hz
  • Pulse duration: 20 ns
  • Resolution, down to 5 µm or less

Micromaching Materials
silicon, plastics, ceramics, glass, sapphire, other inorganic materials and metals

Industrial Applications
A tool for quick investigation on the prototype work with low cost in the following applications:
Microholes in the biomedical catheters, microfluidic channels, microlens array, plastic stent, microvias for circuit packaging, microholes for ink jet nozzles, fiber grating, and so on.