INRF BiON Orientatio

"Engineering the Microworld"

The Integrated Nanosystems Research Facility at The University of California, Irvine (INRF UCI) in the Henry Samueli School of Engineering is dedicated to developing and promoting micro and nano technology through research, education and outreach. The INRF advances multidisciplinary research through fostering communication between traditionally distant fields such as bioscience and engineering and by enlisting researchers from diverse backgrounds. The facility is a 9,600 square foot class 100/1,000/10,000 clean room equipped with all the major devices for micro and nano fabrication. Capabilities include such diverse disciplines such as MEMS, biology, chemistry, optics and physics equipped with all the major devices for micro and nano fabrication. Our facilities are available to our distinguished faculty and students along with other academic institutions and industry. We welcome you to visit us, take a tour and join us in performing high quality research at our world class facility to engineer the microworld.

ORIENTATION

INTRODUCTION

INTEGRATED NANOSYSTEMS RESEARCH FACILITY

BEGIN

BIO-ORGANIC NANOFABRICATION FACILITY

ADMINISTRATIVE ORIENTATION SLIDES

The INRF Clean Room Facility is a class 1,000/10,000 facility, with class 100 work areas and with all major semiconductor fabrication equipment. It is set up to be used in a multi-user mode. Training, maintenance, and common supplies for all equipment is provided by the INRF. In addition to the clean room, further processing and characterization facilities are available through the individual research labs of UCI faculty affiliated with the INRF. All equipment and instrumentation in the INRF are available to all users (UCI faculty, faculty from other universities, undergraduate and graduate students and off campus users) on a recharge basis. Because of the ease of access to the laboratory, the available and extensive training, and wide variety of equipment and instrumentation, the INRF attracts a diverse group of users.

INRF CLEANROOM FACILITY

ABOUT INRF

INRF supports academic research from all units on the UC Irvine campus and neighboring universities. Our faculty and technical staff can bring advanced micro/nanotechnology to your research projects, and also can assist with purchasing support, grant preparation and management, and personnel administration. In addition, we can assist in connecting you with other faculty who have related expertise. INRF is affiliated with the California Institute for Telecommunications and Information Technology (Calit2), a two-campus, multidisciplinary research institute with locations at UC San Diego and UC Irvine. The institute’s goal is to develop innovative information technology-based products and services to benefit society. One key component in facilitating this goal was the construction of the Bio-Organic Nanofabrication facility (BiON) in the Calit2 Building.

The Integrated Nanosystems Research Facility at the University of California, Irvine (INRF UCI) in the Henry Samueli School of Engineering is a world-class clean room devoted to research and development for integrated systems at micro- and nano-size scales. Our facility features more than 9,600 square feet of Class 1000/100 clean-room space, highly trained technical staff and a large variety of equipment for thin films processing, microfabrication and materials growth. INRF offers users the capability to incorporate non-standard processes and materials, pushing the boundaries of new fabrication techniques and integration at ultra-small scales.

BiON is a 4,000-square-foot, Class 1000 clean room dedicated to research and development of micro-nano devices using biological and organic materials. The facility contains tools uniquely capable of performing micro- and nanofabrication on materials such as polymers, hydrogels, collagens, proteins and even living tissue. These materials traditionally have been difficult or impossible to micro-machine since they require special care or unusual process conditions. Many of the manufacturing techniques used in BiON have been developed as experimental processes by researchers in smaller laboratories at UCI and elsewhere; these will now be available to the BiON community at large. This facility allows researchers at UCI and throughout Southern California to develop new technologies and products for environmental, life science and medical applications. The facility supports ongoing work in the areas of bio/nanotechnology, advanced materials, BioMEMS, environmental sensors, medical devices and biological research.

Lab Safety Manual

Emergency Procedures

Safety Standard Procedures

INRF WEBSITE HIGHLIGHTS

Safety Documentation

Major Lab Updates

Updates Delivered to your Email

LATEST NEWS (INRF BLOG)

The INRF Blog keeps user up to date on the INRF and the cleanrooms. The updates are delivered to your email.

And enter your email address in the Subscribe box. Then click Subscribe.

To subscribe, visit: www.inrf.uci.edu/latest-news

INRF users are required to subscribe to the blog

Download the INRF & BION Policy Overview

Please ensure that you have familiarized yourself with the Lab Safety Manual. You may view the manual by clicking on the below link:

Click to view the Lab Safety Manual

User Responsibilities

INRF LAB SAFETY MANUAL

Lab Behavior

Evacuation Assembly Point

Emergency Dialing Instructions

Designated Assembly Area & Evacuation Assembly Point for the INRF

The designated assembly area and evacuation assembly point is at the “The Henry Samueli School of Engineering” brick wall statue outside and away from Calit2 and Engineering Gateway near the intersection of Engineering Service Road and East Peltason Drive.

Jake Hes - 562-522-8328

Steven Martinez - 949-343-1800

Richard Chang - 949-331-8109

Lab Staff

949-824-5222

EMERGENCY DIALING INSTRUCTIONS

EH&S - 949-824-5223

Options Summary

911

The direct link to the training form is at: http://www.inrf.uci.edu/facility/services/training/ *Please Note: Training occurs on Mondays only.

HOW TO RECEIVE TRAINING AND BECOME AUTHORIZED TO USE EQUIPMENT

From the bottom left of the INRF website, click on the Training Request Form link and fill out the form. You can visit the INRF website at: http://www.inrf.uci.edu

Check Equipment status states and updates on equipment

The Forged System is located at: https://inrf.forged.systems/home/login/

Website / Software system that you will use to do many things in the lab including but not limited to:

View Lab/Facility conditions

View Equipment Schedules and Reserve Lab Equipment

View Equipment SOPs and YouTube video training

Begin and End Equipment sessions (to gain access to Equipment)

FORGED SYSTEM

View SDS (formerly MSDS) for all materials in the facility

1. INRF Website or

2. In the Forged System itself

The Forged System SOPs page is located at: http://www.inrf.uci.edu/facility/forged-system/

How to use

Specific instructions on how to do things in the Forged System can be found on:

Orientation Videos

Technical Orientation Videos on the INRF website

Training Videos

The INRF Youtube videos will help you to understand standard procedures to enter the INRF / BiON cleanrooms facilities and how to operate the tools safely and properly. The videos consist of:

TECHNICAL ORIENTATION VIDEOS

You can view the videos directly on the INRF Youtube channel or the INRF website.

INRF Youtube Channel

Please contact INRF Staff to ensure the completion of the following steps as part of the orientation process:

Submit completed Policy Compliance Agreement form

ADDITIONAL STEPS TO COMPLETE

Gain access to Forged System and set up User Profile

Submit to staff the results to UCI EH&S Safety Training Certification for 1-Lab Safety Fundamentals and 2-Hazardous Waste

Obtain Key Card for Lab Access

You will obtain your Key Card as the last and final step of the orientation process

INRF and BION Orientation Quiz ( Passing score is 80% )

Obtain Cleanroom Lab Garments (hoods, coveralls)

INRF and BION Safety Assessment Quiz ( Passing score is 80% )

Upload profile picture to Forged account profile and ensure the Forged account profile is fully complete, accurate, and always updated

Alarm Systems in the Labs (video coming soon)

Hot Plates and Ovens - Proper Procedures and Safety in Clean

The Technical Lab Orientation Videos Quiz is currently in development and will be coming soon.

*After viewing these videos, it is required that users complete the Technical Lab Orientation Videos Quiz prior to entry in the lab.

Gowning Procedures at INRF / BION Cleanrooms

Waste Disposal Process (video coming soon)

Required Viewings:

Wet Benches - Standard Operating Procedures (*required if doing wet chemistry only)

Chemical Storage Location and Segregation Rules (video coming soon)

Location of Crucial Safety Systems (video coming soon)

INRF LAB SAFETY MANUAL EXCERPTS

INRF Evacuation Assembly Point

Users must read all SOPS on How to Use the Forged System

Requirements

Users must have a fully complete Profile on the Forged System in order to have Lab and Equipment Access

Below are specific requirements for users of the Forged System.

Users must Begin and End ALL equipment sessions (notify Staff if any issue doing so)

Staff now assumes that you have read all required readings, and completed all tasks required in the orientation process including those mentioned in these Orientation slides. If this is true you may contact staff to obtain your key-card and brief in-person lab orientation tour. Please be sure this is the case PRIOR to contacting staff, obtaining a key card and entering either the INRF or BiON facility. Proceed to the next page to complete the orientation slides.

Designated Assembly Area & Evacuation Assembly Point for the BiON

Name:

Submit

Phone:

Message:

Reset

Email:

Please ensure that you have familiarized yourself with the Injuries & Medical Treatments flyer. You may view the flyer by clicking on the below link:

INJURIES & MEDICAL TREATMENTS

Injuries & Medical Treatments flyer

Due to a potential increase chance of risk to campus personnel, please do not leave wet chemical processes unattended on the lab benches after-hours. This includes but is not limited to HF processes, piranha etch solutions and RCA cleans solutions. Repeat: No wet chemical processes are to be left unattended after-hours. Please be sure to plan appropriately and complete your work including finishing cleaning up by end of business day each day.

NO WET CHEMICAL PROCESSES LEFT UNATTENDED AFTER-HOURS

SAFETY REQUIREMENTS

*This is at ALL times. (That is, 24/7, during and after staff/business-hours, at ALL times)

Workers must meet any other requirements established by the INRF/BiON supervisor or Safety Representative

Workers must have completed Laboratory Safety Fundamentals in UC Learning Center

EH&S & Risk Management, therefore INRF and BiON, requires:

Workers should have completed the Laboratory Site Safety Training Checklist

Workers must always work with at least one other person present

FORGED SYSTEM - EQUIPMENT LIST

Users must USE the tool at least once every 6 months in order to maintain authorization and access to the tools. Users can submit a new training request to get re-trained and re-authorized to re-access the tool.

You can find a list of all INRF & BiON equipment located on the Forged System. Just follow the link below:

https://inrf.forged.systems/home/equipment/status/

Low Form Evaporating Dish, PTFE

NOTICE FOR USERS USING HF

Low Profile PTFE Evaporating Dish

All HF must be processed in Teflon containers not poly Styrofoam and in addition these containers must be in a secondary container so as to keep the entire system and process in double containment. The INRF does not provide Teflon containers so users must provide their own. See below links for recommended Teflon containers:

Users must LOG IN and OUT of the labs on the Forged System via the lab terminals at the gown rooms

DO NOT close the Chrome browser or the Forged Website on lab equipment netbooks. ONLY SIGN OUT OF FORGED SYSTEM

DO NOT access the Latch System on lab equipment netbooks.

Users must START and END your equipment sessions on the Forged system and notify staff immediately if any issue arises

Additional Requirements

Users must LOG IN and OUT of the applicable wet benches on the Forged System via the lab terminals at the gown rooms as well

Properly close all cabinets and make sure they are latched

KEEPING IT CLEAN, KEEP IT SAFE

Users need to clean up any mess that is made and be sure to discard of any trash in the appropriate waste containers. This applies not only on tables and benches but also on all tools including evaporators, characterization tools, etc. When it comes to the RIE, ICP, DRIE the rule of thumb is two to one. So if etching for one hour we expect you to do a thirty minute clean. Part of the cleaning process is added to your usage time, and by performing these cleaning processes the tool turn around time for maintenance will be faster. Users that are using various types of tools are responsible for performing the cleaning process.

Do no leave hot plates left on, unattended, and/or use in forbidden locations such as on poly benches.

Also...

Microscope lamps are not left on

Chemicals are not left beyond their acceptable dates

Ovens doors are properly closed and forbidden items are removed

Trash is in the correct trash bin

Be on the lookout for tools that are down, in-repair, or are in maintenance and do NOT attempt to operate the tools in any status but Online. Tags are usually posted physically on the tool, and the tool status is updated on the Equipment status of the Forged system.

Remember that you must have explicit permission from staff to make any modifications to tool recipes and parameters. Generally the only thing that is allowed to be modified is the time of the etch, deposition, or process step. Should you want to experiment with process parameters and modify standard recipes beyond the time, you must first go through staff approval. Doing so without approval risks the health of the equipment for all users and is a violation.

Below is a list of frequent violations that occur in the clean rooms. In order to maintain a safe environment, users much avoid such violations by ensuring:

Contact staff immediately if unsure about any of the above violations.

Flammable cabinets are properly closed

Log books are complete, accurate, and legible

Buddy system and/or PPE protocols are followed properly

Forged sessions are STARTED and STOPPED properly

FREQUENT VIOLATIONS

Hot plates are not left inattended and in forbidden areas

Lock Out / Tag out tags are respected

Chemical bottles are stored properly

Staff will be paying closer attention by checking equipment data logs and log books. Any and all lab violations will be captured on the Forged system and will be tied to the Users’ profile page. Violations and their penalties will be enforced.

Bulk chemicals returned to flammable areas

We have posted ample signage throughout the lab to help remind users of the policies found on the INRF website, in the orientation and training process, in equipment and lab SOP documentation, and in all of the policies and procedures that every user has signed in the User Policy Compliance agreement prior to entering the lab. These policies are in place as safety to not only protect you, but those around you, staff, facilities, and everyone that works in or near these shared facilities. Additionally, the policies are in place to maximize the up-time and minimize the downtime of the tools and equipment in the facility as well as maximize their reliability and repeatability.

IMPORTANCE OF POLICIES

POLICY COMPLIANCE AGREEMENT

Policy Compliance Agreement

New users need to complete the following before they can enter the clean room facility without an escort. Click on the below links to access the documents.

INRF & BION Policy Overview