Integrated Nanosystems Research Facility

The STS and BMR are back online.

It looks like the install of the new compressor for the Engineering Gateway/INRF was a success. This week we will start to bring the tools back online.

Here’s the rundown:

• STS: Needs a new DI recirculating pump. We should have that switched out shortly.
• Trion: We are waiting for the pressure control valve to come back from repair from MKS.
• Ebeam 1: We will be doing a regen and we are waiting for the chamber hardware to come back from cleaning. These parts should be back this week.
• MA6:  We need to start up and check out the system.

We will send out a notice as the tools come up. Thanks for your patience

All equipment training will now take place every Wednesday in order for staff to focus on other duties during the week. You will still need to fill out the Training Request Form in advance. Once we review the request we will then contact you for scheduling.

A new training video on Trion ICP / RIE Dry Etch has been posted to the INRF website. You can view the video by visiting the videos page at:

https://www.inrf.uci.edu/facility/videos/

You can also view the video directly on YouTube:
https://youtu.be/dkMeB3CE7L8

You may also visit the INRF Youtube Channel for additional training videos.
http://www.youtube.com/user/Inrfucirvine/

INRF Staff

Jake was able to complete 3 successful runs yesterday. We are still getting the “Turbo Purge Error” message but not as frequent. We are working to fix that.

A new training video on Hot Plates and Ovens has been posted to the INRF website. You can view the video by visiting the videos page at:

https://www.inrf.uci.edu/facility/videos/

You can also view the video directly on YouTube:
https://youtu.be/NqCnve_ZhJc

You may also visit the INRF Youtube Channel for additional training videos.
http://www.youtube.com/user/Inrfucirvine/

INRF Staff

A new training video on the ABM UV Flood Exposure System has been posted to the INRF website. You can view the video by visiting the videos page at:

https://www.inrf.uci.edu/facility/videos/

You can also view the video directly on YouTube:
https://youtu.be/WRDHDB1XvC0

You may also visit the INRF Youtube Channel for additional training videos.
http://www.youtube.com/user/Inrfucirvine/

INRF Staff

Starting this Monday all equipment, except for Characterization and Spinners, will require that a reservation be made in advance. You will no longer be able to walk up and access the tool without a prior reservation. To access you will need to log into the Cleanlog and choose the Equipment Schedule tab, then select the equipment/time that is available. You may reserve the equipment up to 5 minutes prior to the equipment time slot.

If you plan to come in on Monday to use equipment, we suggest that you schedule this weekend. If you have any questions about equipment reservations, feel free to contact staff.

Thanks for your cooperation!

INRF

Two new training videos on the XeF2 Pulsing Etcher have been posted to the INRF website. You can view the videos by visiting the videos page at:

https://www.inrf.uci.edu/facility/videos/

You can also view the videos directly on YouTube:

XeF2 Pulsing Etcher – Standard Operating Procedures
https://youtu.be/vlL-X3XG00s

XeF2 Pulsing Etcher – How to prepare the sample
https://youtu.be/sHDcSwnewpw

You may also visit the INRF Youtube Channel for additional training videos.
http://www.youtube.com/user/Inrfucirvine/

INRF Staff