Integrated Nanosystems Research Facility

 

BiON HF Users,

Staff has relocated all personal items from BiON HF RM 1432 to INRF RM 2325.

STAFF

SPTS Users,

The SPTS is offline for some overdue maintenance work.

STAFF

BiON HF Room 1432 Notice:

All HF processing from now on will occur ONLY in the INRF Room 2325. Keycards to BiON HF RM 1432 have been de-activated.

STAFF

INRF & BiON Users,

Due to Monday Sept 4th 2018 being a campus holiday, the cleanrooms will not be staffed.  Weekend and Evening Hours policy will be in affect.  The locked wet etch rooms (3 in BiON, 1 in INRF) will be locked on this day.

 

STAFF

BiON Users,

The BiON solvent benches issue has temporarily been resolved, they are once again ONLINE.

-STAFF

BiON Users,

I’ve received word that the BiON is having some issues with its solvent benches system.  The solvent benches in the BiON are offline.

-STAFF

INRF & BiON Users,

In order to ensure safety to all persons, equipment, and research samples it is important for everyone to ensure the Forged system is accurate with the log ins of the facility, wet process benches, and tools.
Please continue to be diligent about having Forged reflect accurately when you are in and out of the lab (BiON & INRF), as well as accurate to when you are using equipment and using those wet processing benches that require it as well.
Management has decided that going forward, failure to do so will result in a penalty fee of three times (3x) the cost of standard use.
Reminder: For etchers, users must remain signed into the tool when running the required post-process chamber O2 cleans
-STAFF

INRF Users,

Facilities Management will be shutting down our INRF CDA supply this Monday 7/30/18 from approx. 8am-2pm. Multiple tools will need to go offline as a result since they require CDA for proper operation (STS, Plasmatherm, E-beam, Thermal Evap, etc).
Forged should update tool status’s accordingly, but please pay extra attention to the CDA status on tools if using them later that day.  Also as always, keep an eye out for tools that are tagged out and any possible posted signage in general.
Thanks,
INRF Staff
INRF & BiON Users,
Contamination is becoming an issue on various tools across the labs.   Two in particular very recently have been the STS and the Plasmatherm. Please be sure to review and abide by the policies aligned for the particular tool you are using.   It seems some materials inside chambers are re-depositing onto other’s substrates negatively affecting results. With respect to the etchers, be sure the proper cleaning procedure is performed as well as recorded in the log book as its own entry.
Going forward if users complain about contamination issues and this results in the need for staff and tool time to be spent  performing additional O2 cleans and manual chamber cleans, the last user that didn’t record or perform the required O2 cleans will be billed accordingly.
Thank You,
INRF Staff

INRF & BiON Users,

With the 4th of July Holiday tomorrow, and due to limited staff on Friday, the INRF & BiON Wet Processing Rooms will be locked and not available for use during the following times:

1-Today 7/3/18 effective immediately
2-Tomorrow Wednesday 7/4/18 All Day
3-Friday 7/6/18 All Day

Notice: The INRF Wet Benches are now reservable like any other tool, and you must start/stop your bench session from the INRF lab entrance terminal much like the BiON benches via the BiON lab entrance terminal. Please be sure you start/end your bench sessions accordingly and reserve your bench in advance as much as possible.