Integrated Nanosystems Research Facility

 

Notes from our Super User:

If you are going to use a recipe that is not standard (so none of the following: O2 Clean, Process A or Process B) they should be aware to change the APC to maintain the usual operating pressure and change the platen etch (the new software multiplies by 10 the saved recipe)

Please check with staff before operating the equipment if the above statement does not make sense to you.

Thanks,
INRF/BION Staff

It will be held next week at the normal time.

Thanks,
INRF/BION Staff

Jake will be out tomorrow (11/13/13) and will be back a little bit late on Thursday. The wet benches will be down during this time.

Best,
INRF/BION Staff

The INRF and BiON will be closed on Monday for Veteran’s Day observance.

Thanks!

INRF Staff

From Facilities:

The failed cooling fan on the VFD has been replaced and the system is operating normally.

The benches are now back open for use. Continue to keep an eye out for any alarms in case this should happen again in the future.

Thanks,
INRF/BION Staff

From Facilities:

One of the two exhaust fans dedicated to the acid benches tripped off yesterday due to excessive heat in one of the variable frequency drives.
The system did not go down completely but one fan is unable to maintain the exhaust plenum set point, hence the bench alarms.
This should be considered and unforeseen equipment failure.
The trouble fan VFD was reset, is running, and is maintaining set point.
We are in the process of ascertaining the cause of the trip and should have an answer for you before noon.

As of now the wet process rooms will be tagged out until we get the “all clear”. We will keep you updated.

NOTE: This is a reminder to always pay attention to the hood alarms and/or any warning signs and to stop your process ASAP. Luckily the users knew what to do and no one was hurt.

Thanks,
INRF/BION Staff

Jake will be out of the office today therefor the wet etch rooms will be closed in the BION. They will be open tomorrow. Sorry for the inconvenience.

Thanks,
INRF/BION Staff

NEW REQUIREMENT

All INRF/ BiON Users and their respective PI or Supervisor are required to review and submit the Policy Compliance Agreement which replaces our “Safety Compliance Form.”

This agreement is due 11/30/13. You may submit to the front desk or submit via e-mail to inrf@uci.edu. If this agreement is not received by the deadline, access to the cleanroom will be de-activated until you are able to submit. If there are any questions, you may e-mail Alana Valencia at anvalenc@uci.edu.

Policy Compliance Agreement

Thanks,
INRF/BION Staff