Integrated Nanosystems Research Facility


Notice to BiON and INRF Users who have stored chemicals:

There are numerous expired chemicals in both the INRF and BiON that belong to individuals and groups.
All expired chemicals will be disposed of on Thursday 10/26/17 unless the responsible individuals or groups co-ordinate otherwise with Richard Chang at by 12pm Wednesday 10/25/17.
Please contact Richard by 12pm 10/25/17 if you don’t want to see your chemicals disposed of.
Since the INRF is closed due to the renovation, please also contact Richard to schedule any need to visit and check on the chemicals in person WITH him and DO NOT enter the INRF facility without staff supervision.
Thank You,

SPTS Users,

The SPTS will not be available between 11/6/17 and 12/11/17 as it is scheduled to undergo a much needed PM on both the system as well as the dry mechanical pump.   The schedule has been posted on the Forged and further details and updates will also be updated there.


BiON Users,

The DI water servicing the BiON has been restored.


This Post is on behalf of Gloria Mark:

INSF recruitment ad

Seeking participants for a study in understanding the workplace experience with sensors


We are seeking participants in state-of-the art research to understand workplace performance, health, and well-being through the use of unobtrusive sensors. This is part of an $8.1 million IARPA funded project. The goal of our study is to use a range of sensors and biosensors to gain a deep understanding of real world work so as to develop models and methods that can ultimately reduce workload and stress and improve work performance and employee health and well-being.


In this study, participants will be asked to wear a wearable device and will use software on their mobile device to measure a wide variety of performance indicators. Individuals’ data will be anonymized and aggregated to maintain privacy and no content will be collected or recorded. The study will take approximately three hours of participants’ time in total spread out over the entire study period of two months. Participants will receive $250 for successful participation.


Benefits for participation

The benefits for participation are substantial. Participants will learn factors that influence their workplace performance, stress, health and well-being. Participants will be part of cutting-edge research involving collaborations with top-tier university researchers.


Study Details

  • Participation will be for two months starting mid-October.
  • Each participant will receive payment of $250.
  • Each participant will be provided with a wearable device (Garmin Vivosmart) and 4 Bluetooth LE beacons (1 dot for a keychain, 1 dot for home, 1 dot at the desk, 1 dot in their backpack/briefcase).
  • Participants will be asked to complete one-time a set of surveys on personality traits, sleep and health habits, stress, and job strain. This enables us to correlate sensor data with ground-truth measures.
  • On a daily basis, participants will fill out short surveys, 1-3 minutes, to additionally serve as ground-truth assessments for daily measures.
  • Participants will be asked to install several smartphone applications on their primary mobile device.
  • Individuals may elect to drop out of the study at any time without penalty.
  • Upon exit of the study, an individual may request to have all relevant information wiped from the study at no penalty to the user.
  • Individuals may elect to opt-in or opt-out to certain portions subject to a minimum sensing suite.
  • Remote and on-site support will be provided for those who need assistance.


The following instruments are provided through funding of the study:

  • Garmin Vivosmart wearable device
  • Smartphone agent (iOS, Android)
    • Location, detection of whether someone is speaking without recording audio content and level of background noise – no identification of speaker nor audio content will be recorded; Proximity / context detection via location and nearby Bluetooth LE (BLE) beacons for detecting others and key locations
  • Sensors for environmental data: temperature, pressure, ambient noise level, light levels.


Other data collection:

  • Social Media (anonymized, for sentiment analysis)
  • Infrequent probes lasting a few seconds (e.g. asking about mood) though such efforts will be strictly limited


  • The following Data collection is OPT-IN
  • Logging laptop usage (for productivity, workload measures); Content WILL NOT be recorded, only time-stamps of applications in active use.
  • EMail, calendar (anonymized, only metadata, NO CONTENT)
  • Email will be header only – from, to, cc, bcc, subject length, body length, attachment number, attachment length
  • Calendar will include title length, location length, hashed location information, attendees, note length, dial-in information (present – yes or no)
  • Internal Social Media: Yammer, Slack – metadata / anonymized IDs
  • Eye tracking for mental workload measures


Mitre Corporation Testing and Evaluation teams will analyze anonymized privacy-preserved data streams to provide independent validation. These anonymized datasets are for internal use only and will not be made publicly available.


For further questions on how you can participate, please contact:


Professor Gloria Mark, Informatics:

Ge Gao, Informatics:

Krithika Jagannath:


INSF recruitment ad

BiON Users,

The DI water will be shut off Thursday and Friday this week 10/12 and 10/13 .  Due to this, there is to be no wet processing/developing.

Reminder: There is no wet processing after-hours, which means after today there is no further wet processing until Monday 10/16/17.


To the Research community,


We want to give you an update on the renovation project in INRF.


The facility has gone through a major renovation of the exhaust ventilation system and the replacement of the process and air conditioning chilled water lines.

Unfortunately, we did not meet our target date of 9/20/17.  There were some unforeseen issues with the ventilation design which have been identified and are in the process of being addressed and corrected.


The processed chilled water and air conditioning piping has been completed.  The start-up will be done once the interstitial area has been cleaned up. This will not prevent us from starting up the processed chilled water that supports the lab equipment.

While the ventilation system is being corrected, during this time facilities will take the opportunity to perform preventive maintenance, which is normally done toward the end of the year. Also the campus facility management team will be making some corrections to the DI water system.  This has pushed the completion date to 10/31/17.

We have been working with Facilities Management to give us access to critical pieces of equipment within the facility such as, reactive etching, metallization and some lithography.  The areas will not be up to clean room standard but will give us some capabilities.

  • Facilities Management will get their work-around completed on 9/26/17.
  • The lab staff will start up these critical pieces of equipment on 9/27/17.
  • Our goal is to have these critical pieces of equipment up and accessible 10/2/17.


Researchers will still need to perform photolithographic work, such as, spinning on photo resists and developing the resist in the BiON.  Same goes for wet processing.


We are happy to say that once the renovation is completed in the INRF we will have full capabilities for performing wet processing and Lithography.

These wet station benches will now have laminar flow capability which will give us a class 100 or better working environment.  This should improve our yield tremendously.


Our apologies for extending the completion date.  The benefits will be worth the wait.


Thank you for your cooperation,



G.P. Li

Jake Hes

Marc Palazzo




INRF Users,
Unfortunately due to unforeseen circumstances, the facilities renovation is not yet complete in the INRF.  We do not yet know the exact time schedule of the delay, but we’ll update as and when we know more.

BiON Users,

For those that didn’t notice this morning, the BiON is once again available for use and it is ok to enter.


BiON Users,

Due to a small spill of SU-8 Developer in room 1431, there is a remaining odor most especially in that room but also in other areas of the lab.

As a precaution, the BiON will be unavailable until Monday 8/28/17.


INRF & BiON Users,

Due to a potential increase chance of risk to campus personnel, for the time being please do not leave wet chemical processes unattended on the lab benches after-hours.
This includes but is not limited to HF processes, piranha etch solutions and RCA cleans solutions.
Repeat: No wet chemical processes are to be left unattended after-hours.
Please be sure to plan appropriately and complete your work including finishing cleaning up by end of business day each day.
Thank You,
INRF Staff