It looks like the install of the new compressor for the Engineering Gateway/INRF was a success. This week we will start to bring the tools back online.
Here’s the rundown:
- STS: Needs a new DI recirculating pump. We should have that switched out shortly.
- Trion: We are waiting for the pressure control valve to come back from repair from MKS.
- Ebeam 1: We will be doing a regen and we are waiting for the chamber hardware to come back from cleaning. These parts should be back this week.
- MA6: We need to start up and check out the system.
We will send out a notice as the tools come up. Thanks for your patience