STS plasma therm RIE & PECVD & low temperature BMR oxide and Nitrite systems are all off line due to our CDO (polution control device) that is required to be in operation while operating these tools experienced a high temperature alarm on the exhaust. While looking into this problem we noticed the reactive gases are eroding internal components. These components must be replaced. There is a good chance the systems will be back online this weekend.
Ion Milling system experienced a chamber vacuum leak and also the neutraliser wire needs to be replaced. At the present time we are using a leak detector to locate and verify the leak.
System should be back online by Monday.
ALD has been disassembled and the chamber and vacuum components to be sent out to be bead blasted. System should be back by Tuesday and we will be reassembled on Wednesday.
Gasonics experienced a faulty replacement part. We received the new part and has been installed but needs to be electronically set up. We hope to have the system up by this weekend.
Hitachi SEM baked out system for last three days. We are replacing the apature and realigning the beam. If all goes well the system should be back up by Thursday evening or Friday.
A Nano imprinter user was using the system Wednesday and noticed oil in the vacuum foreline. The system is tagged out temporily while I clean the foreline. It should be back online by Friday.
Saftey and Observation note.
USERS NEED TO BE MORE CONSCIENTIOUS ABOUT CLOSING WASTE CONTAINERS AFTER COMPLETION OF USING THE CONTAINERS. VERIFY THAT THE STORAGE CONTAINERS ARE FOR REACTIVE MATERIALS, SUCH AS SOLVENT AND ACIDS, AND THEY ARE THE PROPER CONTAINERS AND PROPERLY IDENTIFIED.
We observed while inspecting the lab in the evenings that users are leaving the microscope light on at high intensity. This creates more work for staff replacing lamps. If users do not know how to operate the microscopes properly please contact staff. We also noticed the stage locks being over tightened. Users are forcing the stage up and down which damages the microscope.
Your help in this area would be appreciated.