Integrated Nanosystems Research Facility

INRF Users,
Unfortunately due to unforeseen circumstances, the facilities renovation is not yet complete in the INRF.  We do not yet know the exact time schedule of the delay, but we’ll update as and when we know more.

BiON Users,

Due to a small spill of SU-8 Developer in room 1431, there is a remaining odor most especially in that room but also in other areas of the lab.

As a precaution, the BiON will be unavailable until Monday 8/28/17.


All INRF and BiON Users:
Reminder: Monday July 31st, 2017 from 3:00PM – 4:30PM in location Calit2 Room 3008 we are hosting the last make-up session for those that missed the June 2017 All Hands Event  Users that do not attend one of these events will be restricted lab access as attendance is mandatory.
The last make-up session this summer will be this Monday July 31st, 2017 in Calit2 Room 3008 from 3:00PM – 4:00PM , after which there may only be one in the Fall should demand and a need be there.
For these make-up sessions, please RSVP to and in the subject line please use “Make-Up Session 2017”

Thank You,

INRF Staff

Reminder to All INRF Facility Users:

The entire lab and all tools will be shut down by end of business day today.  I’ve just been informed that everyone needs to finish their process, finish cleaning up their process, and exit the lab by 5:00PM today. No Exceptions.

Please plan accordingly and give yourself enough time to not just finish your process, but also as well as clean up and leave your area clean and back to its normal idle state and exit the lab by 5:00PM.

Lab access and all tools in the INRF will be unavailable until further notice.

*This does not apply to the BiON

-INRF Staff


INRF Users,

The INRF Facility will be shut down as well as all tools will be shut down by end of business day this Thursday July 27, 2017 for the facilities project work occurring July 28 – Sept 20.  Lab access and all tools will be unavailable until further notice.

INRF Staff

In a follow up to the June 15th post (copied below for convenience):

Website links for Teflon container’s suppliers for HF

Part # 3754-06

180mL Low Profile PTFE Evaporating Dish with straight sides & spout, 40mm Height x 136mm OD

Price = $78.20,168.aspx

Dynalon Item #: 355314-0400

Item#: 5531-0400

List Price: $65.72

Low form evaporating dishes with pouring spout are manufactured from pure PTFE with heavy wall. Inert and useable to 260ºC. Smooth internal finish.

Diameter = 130 mm

Capacity = 400 ml


Notice to Users using HF:
We are seeing an increased usage of 48% HF being used.  All 48% HF must be processed in Teflon containers not poly Styrofoam and in addition these containers must be in a secondary container so as to keep the entire system and process in double containment.
The INRF does not provide Teflon containers so users must provide their own.
INRF Staff

BiON Users,

I’ve just been informed that facilities will be performing work on exhaust in the BiON this Saturday 7/29/17.  

Anything in the BiON that uses exhaust will be unavailable. Laminar flow processing benches, lithography,  hot embossing, and acid rooms will be offline during the work.

INRF Staff



Attached are some project details regarding the 7/28/17 – 9/20/17 INRF facility shut down.


INRF Users,

The INRF Facility will be shut down as well as all tools will be shut down by end of business day this Thursday July 27, 2017 for the facilities project work occurring July 28 – Sept 20.  Lab access and all tools will be unavailable until further notice.

INRF Staff

INRF Users,
The IRNF lab compressed air issue has been resolved. This facility item is back Online.
INRF Staff

1- Users that are using various types of tools are responsible for performing the cleaning process.

When it comes to the RIE, ICP, DRIE the rule of thumb is two to one.  So if etching for one hour we expect you to do a thirty minute clean.

This has not been occurring and this needs to change.  While Jake has been performing maintenance on the various chambers he has noticed they have been very dirty/ contaminated.  Part of the cleaning process is added to your usage time, and by performing these cleaning processes the tool turn around time for maintenance will be faster.


2- Lab-wide, users are also responsible for cleaning up after themselves.  Please be sure to clean up any mess that is made and be sure to discard of any trash in the appropriate waste containers. This applies not only on tables and benches but also on all tools including evaporators, characterization tools and etc. Please keep the areas clean.
3- Please also remember that you must have explicit permission from staff to make any modifications to tool recipes and parameters.  Generally the only thing that is allowed to be modified is the time of the etch, deposition, or process step.  Should you want to experiment with process parameters and modify standard recipes beyond the time, you must first go through staff approval.  Doing so without approval risks the health of the equipment for all users and is a violation.
4- Be on the lookout for tools that are down, in-repair, or are in maintenance and do NOT attempt to operate the tools in any status but Online.  Tags are usually posted physically on the tool, and the tool status is updated on the Equipment status of the Forged system.
5-Be sure to start and end your equipment sessions on the Forged system and notify staff immediately if any issue doing so.
6-Be sure to reserve your tool time on the Forged system tool calendar.  Staff does this with planned maintenance or repair work as well.  Viewing the calendar regularly will update you with such plans, and ensures that the tool will be available when you have reserved it.
7- Other things staff has been noticing in recent weeks include:
– the lack of the use of complete and accurate red hazardous in use and  blue process in use labels.  Many new labels have been recently created and can be found throughout the lab
-cabinets are being left open, or not properly closed and latched
-hot plates are being left on, unattended, and/or being used in forbidden locations (hot plates are not to be used on poly benches)
-buddy system and/or PPE protocols are not being followed properly
-chemicals are being left out beyond the time they should be left
We have posted ample signage throughout the lab to help remind users of the policies found on the INRF website, in the orientation and training process, in equipment and lab SOP documentation, and in all of the policies and procedures that every user has signed  in the User Policy Compliance agreement prior to entering the lab.
These policies are in place as safety to not only protect you, but those around you, staff, facilities, and everyone that works in or near these shared facilities. Additionally, the policies are in place to maximize the up-time and minimize the downtime of the tools and equipment in the facility as well as maximize their reliability and repeatability.
Staff will be paying closer attention by checking equipment data logs and log books. Any and all lab violations will be captured on the Forged system and will be tied to the Users’ profile page.  Violations and their penalties will be enforced.

Your compliance is appreciated.

Thank You,


Campus Holiday Break: 12/23/16 01/02/17

  • The INRF and BION cleanrooms will remain open throughout the Holiday break.
  • All the tools will be accessible for those with access to them however HF (rm 1432) & Inorganic (rm 1421) rooms will be closed.
  • INRF Office will be closed and lab staff will be off during this time.
  • Lab Staff will not be available by phone over the break
  • Check your access for the cleanroom (keycard and logins) and tools BEFORE the break to make sure you will have no issues
  • Contact Richard if you need 24hr access or need a refresher on a tool before the break.
  • For Facilities Issues contact 949-824-5444  / For Emergencies 911

Have a safe and happy holiday,

INRF Staff