Integrated Nanosystems Research Facility


The Ebeam1 will be taken off line tonight for a cryo regen. We will send out a post when it is back up on Thursday.

Starting May 6th the Weekly User Meeting will return. This is open for users of the INRF/BION to meet with staff to get weekly updates on equipment status, cleanroom projects and other issues regarding the cleanrooms.

  • When: Every Wednesday @ 1:30 pm starting 05/06/15
  • Where: Engineering Gateway rm 3311


The Mark 50 will be down a little big longer than anticipated for a more thorough cleaning and we will hopefully have it back up by mid next week. We will let you know once its back up.

The Mark 50 will be down for maintenance until Monday (04/27).

A new training video on the CHA Mark 50 Evaporation has been posted to the INRF website. You can view the video by visiting the videos page at:

You can also view the video directly on YouTube:

You may also visit the INRF Youtube Channel for additional training videos.

INRF Staff

A few guidelines in order to bring in a guest:

  • ALL Guest (users and non-users) are approved on an exceptional basis and a request to staff must be made in advance of the guest coming.
  • Commercial and External Academic guests must sign in at the front office and sign a Liability Waiver.
  • Guests are there for observation only and cannot perform any work within the cleanrooms.
  • Guest serving as a buddy in the wet etch area must be an approved cleanroom user that has been qualified to use the wet benches