Integrated Nanosystems Research Facility


The STS will be down until Thursday for maintenance on the chiller. We will make a post once its back up.

We are pleased to offer users “Cleanroom Fundamentals” a training course designed for new cleanroom users or those that would like to be acquainted with our facility/tools and basic fabrication process training. This course will be a prerequisite for our in-depth process training courses which are coming soon!

The course will be offered in Calit2, Room 3008 as follows:

April 9th 1:00PM – 3:00PM
April 15th 11:00AM – 1:00PM

To register for the course, e-mail with your name and preferred date. If you have any questions on the course, you may contact the instructor, Dexter Humphrey at

The INRF Store will now carry:

  • 4″ Double-Sided P-Type Si wafers w/ 1 Micron Thermal Oxide ($44 ea)

Environmental Health and Safety is sponsoring a discounted hazardous materials/waste disposal event, please see the attached flyer.  This event will take place on the Engineering Tower loading dock on April 9th, 2015 from 9:00am to 12:00pm

NOTE: Staff will be doing inventory of the chemicals in the INRF/BION. Any non-active or unlabeled chemicals will be disposed of. Please come by the lab ASAP to make sure that your chemicals are labeled correctly with a current date. 

Haz Waste Spring Cleaning Collection Event-Eng


This is a reminder that tomorrow (3/27) is Cesar Chavez Day and it is a campus holiday. The labs will be open to 24hr users however no staff will be present.

Reminder: Please get staff approval before changing recipes on any of the tools.

The BiON will be closed:

• Friday (03/20) between 7-8am
• Saturday (03/21) All Day
• Sunday (03/22) All Day

We will post as soon as they’re back up.

Facilities will be performing exhaust maintenance this weekend therefor the BION cleanroom will be closed.

NOTE: There will also be a High Temp water shutdown in both facilities this weekend so there will be no heat in the buildings.