Integrated Nanosystems Research Facility


Yesterday we had some users doing lithography in both INRF and BiON and were not getting good results. When we have hot dry weather it is good practice to pay attention to temperature and humidity in both labs.  The BiON was at 16% and INRF 30% humidity. We have Temp/Humidity monitors in various rooms throughout the labs.

The INRF & BION lab will be closed this coming Saturday and Sunday for facilities maintenance on the exhaust.

  1. Reactive materials on wet benches need to be removed and disposed of by the end of Friday (5/2/14) work day.
  2. The utilities in the Laurell spinner were left on again last Friday. Please pay attention. 

First – Friday evening when doing the night rounds in the BION there was a note on the board stating that one of the double containment containers that hold the acids had liquid in it. These type of things need to be brought to the staffs attention (lab staff or front office) right away. The note wasn’t seen until 6 pm so the length of time the liquid was there is unknown and by that time Jake had no support in the clean up.

Second – We have still been having contamination issues with SU-8 spinner in the hot embossing area. When checked last Friday night, the spindle that drives the chuck was contaminated and would not allow it to start up. Also the vacuum valve was stuck in the open position. This has been happening at least once a week. If you are unsure how to operate the equipment properly please see staff as this effects the work of others around you.

A new training video on the Atomic Layer Deposition (ALD) System has been posted to the INRF website. You can view the video by visiting the videos page at:

You can also view the video directly on YouTube:

You may also visit the INRF Youtube Channel for additional training videos.

INRF Staff

If you are using the shared suits in the INRF/BION please use the blue (disposable) booties only.  DO NOT take them from other users suits. We are getting complaints from our full time users that their booties/shoecovers are missing. If you are a full time user and need a new suit,booties, or hood please see Ryan in the INRF.  DO NOT take them from other users suits.


Next week Lifeng will be hosting a small 1 hr demo of the chemical wet process room.  You will need to RSVP with Ryan via email ( This will only be open to 6 users and its first-come, first-served.

He will cover:

  • Proper operation of the laminar flow hood
  • Wast management of reactive chemicals
  • Labeling

Today is the last day to label/date your SU-8 containers under the hood and no we will not mark them for you. Tomorrow they will be disposed of.