Integrated Nanosystems Research Facility


Today, the BiON wet etch rooms will be closed due to a shortage of staff in BiON. If you have an urgent need, please come to the INRF Office and we will open on a case by case basis.

We apologize for any inconvenience this may cause.

INRF Staff

The SU-8 spinner is now installed and available to use! Please just verify the level before applying SU-8.

A new training video has been posted to the INRF website. The training video covers Backside and Topside Alignment using the Karl Suss MA6 Mask Aligner tool.

You can view the video by visiting the videos page at:

You can also view the video directly on YouTube:

Karl Suss MA6 – Backside and Topside Alignment

You may also visit the INRF  Youtube Channel for additional training videos.

INRF Staff

We will be cleaning out unused/old SU-8 bottles underneath the Hot embossing bench in the BION. If you have one you are using please update the date on the label with the current date. There is too much material being stored under there.


Apparently facilities ordered the wrong part and we will have to wait longer for the correct one to arrive. We will let you know once we get a date. Wet etch rooms will operate as we have been until then. In the mean time get your equipment logs signed and chemical usage forms in to make the transition go smooth once they do get installed.

The installation of the new proxy readers is today. There will no access to the wet process rooms while they are working. Once installed, only those users that have been qualified (training log must be signed) and that have completed the chemical usage form: will be authorized to access.

Let us know if you have any questions.

Observations from last night

1) The HarrickO2 was in the mode of “Switch On” on the Pump
2) The Microscope in the SU-8 room wasn’t turned off
3) The door of an Oven in the SU-8 room was not fully closed.

Users need to be more responsible using the tools. This kind of behavior will lead to tools being down more frequently (like the SU-8 spinner) and if you are found to be the one responsible, loss of your tool and possibly cleanroom access.

Please pay attention

As stated before, the room entering into the BION is under construction. The main door is being left unlocked and the key reader has been moved to the door entering the locker/pregowning room and is functional. We will let you know if we get any updates.

The SEM is back up. All users who had access will need to get re-certified as there hes been some changes to standard operating procedure.

There will be some light construction over in BION rm 1322. This should not affect you access to the cleanroom.