Integrated Nanosystems Research Facility


Jake will be off Monday (12/2) & Tuesday (12/3). The wet etch rooms will be closed for those days.

Jake will be off Monday (12/2) & Tuesday (12/3). The wet etch rooms will be closed for those days.

Cleanroom Notebooks are now available in the cleanroom store. These are double wrapped 8 1/2″ x 11″ college ruled/grid. They are $18.

Jake has removed the substrate out of the etch chamber but after inspection of the chamber he found it was very dirty and needs to be sent for cleaning and have Teflon insulators replaced.

We will keep you updated.

For the month of December we will be having a couple of closures of the INRF/BION cleanrooms.

  1. 12/9 – 12/13 for equipment & infrastructure maintenance.
  2. 12/23 – 01/01 for the holiday break.

We will be back January 2nd 2014.

Happy Holidays,

We are having a proxy reader installed on the back door of the INRF. Users will be able to access the cleanroom using their existing INRF/BION card during normal hours and afterhours for those that are qualified.

Proxy reader at stairwell to be installed

Click to Enlarge


The Gaertner Ellipsometer is back online! Please contact Enric for training.


Jake will be in around 2pm tomorrow. Wet etch rooms will be closed until he comes is.


This is for those of you that missed the All Hands Safety Meeting. Please plan on attending this.

Date: Tuesday, 11/26
Time: 2:00 PM – 4:00 PM
Place: Calit2, Room 3008


Message from Facilities:

As you are aware we are experiencing some humidity control issues at the BION facility.
The humidifiers have been working fine for several months now but two weeks ago we started to experience unexplained failures.
Since we have never had any official training on these units I contracted with the factory representative to come out to repair the units and provide training. They will be out Tuesday of next week.
The OSA RH has been very low for the last couple of days which has compounded the problem but forecast higher humidity will offer some relief.

We thank you for your patience,