Integrated Nanosystems Research Facility


Photoresist room (rm 2332) wet bench drain is not working properly due to someone inadvertently poured acetone or some type of solvent down the drain that fused and melted the ABS drainpipe. Facilities has to order replacement parts. The bench can only be used as a dry bench. Check with staff for further information.

We will be working on the Plasma therm RIE chamber to repair turbo pump
for low pressure process. Also cleaning the chamber. System will be back
online July 12th.
The K & S 780 dicing saw is down due to a cooling water leak in the sample
chuck which needs to be disassembled and repaired. System should be back
online July 15th.