Welcome to the Integrated Nanosystems Research Facility (INRF). The INRF was set up to facilitate research in micro- and nano-systems technology. It is an 8600 sq. ft., class 1,000/10,000 clean room facility, with class 100 work areas and with all major semiconductor fabrication equipment. As a research facility, most of the equipment is made available to all users, with flexible usage policies. This makes the INRF a unique facility, and a wonderful resource for academic and industrial scientists.

INRF users enjoy the following privileges:

• Training for use of the INRF clean room facility
• Training and certification for use of any "public general use" equipment
• Unsupervised use of any "public general use" equipment for which the user is certified
• Use of standard chemicals and INRF materials

New users need to complete the following before they can enter the clean room facility without an escort:
Note: The forms below were created to fill out online using Adobe PDF 5.0 or later.

UCI Users	Account Authorization Form Emergency Notification Form INRF User Safety Training Key Issuance Form
Academic Users (Non UCI)	Account Authorization Form Emergency Notification Form INRF User Safety Training Key Issuance Form
Commercial Users	Account Authorization Form (Commercial) Liability Release Contract INRF Agreement for Access Emergency Notification INRF User Safety Training Key Issuance Form

Once these have been completed, users can expect to receive the following:

• One electronic key (per user)
• INRF User Safety Training Manual
• Clean room garments (for use in the clean room only)
• A box to carry/store samples.

• INRF Chemical Hygiene Plan
• INRF Emergency Phone Numbers (available in INRF)
• MSDS literature for all hazardous chemicals in the facility
• UCI environmental health and safety literature

As in most research facilities, some of the INRF equipment have hazards associated with them. These hazards can be minimized through proper user training, and sensible usage policies. We require all new users to take two types of training: (1) INRF user safety training, and (2) equipment specific training (for each piece of equipment). Through these training sessions, you will learn the policies concerning the safe and proper use of the facility. If you have any concerns regarding safety at any time, do not hesitate to contact INRF staff.

Our goal is to help all users use the facility properly and safely, minimizing the risks and wastes associated with the facility. We hope the facility meets your research needs, and look forward to your success. Sincerely,

G. P. Li
INRF Director