6 Inch Dry and Wet Oxidation Tube (Staff Tool)
4 Inch Boron Tube (staff tool)
2 Inch Nano furnace Tube (staff tool)
4 Inch Min-Brute Tube
Furnace used for bonding substrate.
Heatpulse 610 RTA
Heatpulse 610 RTA is a desktop rapid thermal processor for 2 to 6 inch wafer, which uses high-intensity, visible radiation to heat single wafer for short periods at precisely controlled temperatures.