CHA Mack 50 Evaporation
E-Beam 1 evaporation (Temescal CV-8)
This tool is a four-pocket e-beam evaporator used for depositing Au, Ti, Ni, Cr, Si, Ge and Pt.
E-Beam 2 evaporation (Temescal CV-14)
CHA Thermal evaporation (SEC-600-RAP)
PE 4400 Sputtering
PE 2400 Sputtering A
A sputtering sustem with an RF generator. It has a manual load system, and 6 table positions.
PE 2400 Sputtering B