INRF Clean Room Facility
The INRF clean room is a class 1,000/10,000 facility, with class 100 work areas
and with all major semiconductor fabrication equipment. It is set up to be used
in a multi-user mode. Training, maintenance, and common supplies for all equipment
is provided by the INRF. In addition to the
clean room, further processing and characterization facilities are available
through the individual research labs of UCI faculty affiliated with the INRF.
All equipment and instrumentation in the INRF are available to all users (UCI faculty,
faculty from other universities, undergraduate and graduate students and off campus
users) on a recharge basis. Because of the ease of access to the laboratory, the available
and extensive training, and wide variety of equipment and instrumentation, the INRF
attracts a diverse group of users. Some of the equipment and instrumentation available
for use on a recharge basis in the laboratory are listed in this web site.
